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SYSTEM AND METHOD FOR SCANNING A BEAM OF ULTRA-SHORT PULSE LIGHT
专利权人:
发明人:
VOGLER KLAUS,GORSCHBOTH CLAUDIA,DONITZKY CHRISTOF
申请号:
IN2535/KOLNP/2015
公开号:
IN2015KN02535A
申请日:
2015.08.03
申请国别(地区):
IN
年份:
2016
代理人:
摘要:
An embodiment of a scanning optical system (10) comprises: an optical source (22) providing a beam (38) of pulsed light of ultra- short pulse duration a deflector (26) for deflecting the beam through a scan angle a lens system including a focusing objective (30) for focusing the deflected beam a dispersion compensating device (25) for reducing dispersion-related distortion of a pulse of the beam by the lens system, the dispersion compensating device including a deformable, dispersive mirror (42) and an actuator device (44) for the mirror and a controller (18) for controlling the actuator device to change a shape of the mirror in accordance with the scan angle.
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