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SYSTEME ET PROCEDE PERMETTANT DE BALAYER UN FAISCEAU DE LUMIERE A IMPULSIONS ULTRACOURTES
专利权人:
WAVELIGHT GMBH
发明人:
VOGLER, KLAUS,GORSCHBOTH, CLAUDIA,DONITZKY, CHRISTOF
申请号:
CA2899262
公开号:
CA2899262A1
申请日:
2013.03.15
申请国别(地区):
CA
年份:
2014
代理人:
摘要:
An embodiment of a scanning optical system (10) comprises: an optical source (22) providing a beam (38) of pulsed light of ultra-short pulse duration; a deflector (26) for deflecting the beam through a scan angle; a lens system including a focusing objective (30) for focusing the deflected beam; a dispersion compensating device (25) for reducing dispersion-related distortion of a pulse of the beam by the lens system, the dispersion compensating device including a deformable, dispersive mirror (42) and an actuator device (44) for the mirror; and a controller (18) for controlling the actuator device to change a shape of the mirror in accordance with the scan angle.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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