Kendall, Mark Anthony Fernance,Jenkins, Derek William Kenneth
申请号：
AU2009212106
公开号：
AU2009212106B9
申请日:
2009.02.05
申请国别(地区):
AU
年份:
2014
代理人:
摘要：
A method of producing projections on a patch including providing a mask on a substrate and etching the substrate using an etchant and a passivant to thereby control the etching process and form the projections, wherein the passivant does not include oxygen.
