KENDALL, MARK ANTHONY FERNANCE,JENKINS, DEREK WILLIAM KENNETH
申请号:
CA2749347
公开号:
CA2749347C
申请日:
2009.02.05
申请国别(地区):
CA
年份:
2018
代理人:
摘要:
A method of producing projections on a patch including providing a mask on asubstrate and etching the substrateusing an etchant and a passivant to thereby control the etching process andform the projections, wherein the passivant does notinclude oxygen.