The present invention provides a manufacturing method of pulse pressure sensor and gap thereof, which comprises: a substrate whose middle part has a set of supporting piles of capacitance induction thin-film layer and a set of supporting piles of pressure thin-film layer a set of capacitance circuit layout layers located on the supporting piles of capacitance induction thin-film layer a set of pressure circuit layout layers located on the supporting piles of pressure thin-film layer a capacitance induction thin-film layer on the capacitance circuit layout layers a pressure thin-film layer located above the capacitance induction thin-film layer and the pressure circuit layout layers and a gap between the capacitance induction thin-film layer and the pressure thin-film layer. The pulse pressure sensor of the present invention can obtain a better pressure thin-film displacement, and can be precisely applied in applications resembling the pulse diagnosis of Chinese medicine.本發明提供一種脈搏壓力感測器及其間隙的製作方法,其包含有一基板,其中間部分設有一組電容感應薄膜層支撐樁與一組壓力薄膜層支撐樁;一組電容線路佈局層,其係位於電容感應薄膜層支撐樁上;一組壓力線路佈局層,其係位於壓力薄膜層支撐樁上;一電容感應薄膜層,其設置於電容線路佈局層上;一位於電容感應薄膜層與壓力線路佈局上方的壓力薄膜層;以及一位於電容感應薄膜層與壓力薄膜層之間的間隙。本發明之脈搏壓力感測器能獲得較佳的壓力薄膜位移,可精確應用於類中醫脈診上。10...脈搏壓力感測器12...基板14...基板連接層16...電容感應薄膜層支撐樁18...壓力薄膜層支撐樁20...線路層22...電容線路佈局層24...壓力線路佈局層26...第一中間連接層28...金屬接點層30...金屬接點層32...第二金屬層34...電容感應薄膜層36...金屬接點層38...第一凸出部40...第二中間連接層42...第一穿槽區44...金屬接點層46...第三金屬層48...第二穿槽區50...金屬接點層52...第三中間連接層54...第三穿槽區56...金屬接點層60...第四金屬層62...壓力薄膜層64...第二凸出部66、66’...測試電極與訊號接點
