PROBLEM TO BE SOLVED: To provide a highly sensitive capacitive ultrasonic transducer and a method of manufacturing a stacked capacitive ultrasonic transducer.SOLUTION: Capacitive ultrasonic transducer cells are two-dimensionally arranged within and along the surface of a substrate, and stacked in a direction perpendicular to the substrate. The capacitive ultrasonic transducer cell has a substrate, an electrode formed on the substrate, a membrane formed across a gap layer, a membrane-supporting member for forming the membrane on the substrate across the gap layer, and an electrode formed on the membrane. The membrane-supporting members of the capacitive ultrasonic transducer cells has a stacked structure so that each of the membrane-supporting members is located substantially at a center of the lower membrane.COPYRIGHT: (C)2009,JPO&INPIT【課題】高感度な静電容量型超音波振動子および積層型静電容量型超音波振動子の製造方法を提供する。【解決手段】基板と、前記基板上に形成した電極と、空隙層を隔てて構成されるメンブレンと、前記メンブレンを、前記基板上に空隙層を隔てて構成するためのメンブレン支持部と、メンブレン上に形成した電極とからなる静電容量型超音波振動子セルを、前記基板の面内に沿って二次元に配列すると同時に、前記基板に対して垂直方向にも積層配置した構造を有し、前記静電容量型超音波振動子セルの前記メンブレン支持部が、1層下のメンブレンの略中心部に位置する積層構造を有することを特徴とする。【選択図】図20
