PROBLEM TO BE SOLVED: To provide a defect inspection device capable of easily detecting defects in objects under inspection.SOLUTION: A defect inspection device (1) includes a light source unit (60) configured to emit dot matrix- or slit-like light, a first polarizing unit (7) configured to polarize the light (A) from the light source unit (60) in a first direction, and a second polarizing unit (4) configured to polarize the light, which has been polarized in the first direction, in a second direction, and is provided with a space for inserting an object to be inspected (2) between the first polarizing unit (7) and the second polarizing unit (4).SELECTED DRAWING: Figure 1COPYRIGHT: (C)2018,JPO&INPIT【課題】被検査物に含まれる欠陥を容易に検出可能な欠陥検査装置を提供する。【解決手段】欠陥検査装置(1)は、ドットマトリクス状又はスリット状に光を出射する光源部(60)と、光源部(60)からの光(A)を第1方向へ偏光する第1偏光部(7)と、第1方向へ偏光された光を第2方向へ偏光する第2偏光部(4)とを備え、第1偏光部(7)と第2偏光部(4)との間に被検査物(2)を挿入するための空間が設けられている。【選択図】図1
