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垂直共振面発光レーザアレイ
专利权人:
株式会社村田製作所
发明人:
松原 一平,粉奈 孝行,岩田 圭司
申请号:
JP20150528175
公开号:
JP6137318(B2)
申请日:
2014.05.27
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
A VCSEL array includes a base substrate, VCSEL element columns arranged in a row direction (y direction) on a front-surface side of the base substrate and parallel wiring lines that connect the VCSEL element columns in parallel with each other. Each of the VCSEL element columns includes a plurality of VCSEL elements arranged in a column direction (x direction) and a plurality of series wiring lines. The plurality of series wiring lines serially connect every two VCSEL elements that are adjacent to each other in the column direction among the plurality of VCSEL elements in such an orientation that the forward directions of the two VCSEL elements match. Insulating grooves are formed on the base substrate. The insulating grooves electrically insulate the VCSEL element columns from each other. The insulating grooves electrically insulate the VCSEL elements from each other.
来源网站:
中国工程科技知识中心
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