PROBLEM TO BE SOLVED: To provide a film deposition method capable of improving the peel strength of an interface between a metal and a resin in a thin film having a resistive layer on at least one surface of a thermoplastic resin film.SOLUTION: The film deposition method of an electrical resistance thin film layer on the surface of a thermoplastic resin film comprises: forming the electrical resistance thin film layer without interposing an adhesive on at least one of surfaces of the thermoplastic resin film; and heating the electrical resistance thin film layer by microwave irradiation so that the temperature of the electrical resistance thin film layer by the heating is between a heating lower limit temperature determined at a glass transition point and a heating upper limit temperature determined by adding one third of the temperature of a difference between the glass transition point and melting point of the thermoplastic resin film, to the glass transition point.
