PROBLEM TO BE SOLVED: To provide an unevenness extraction device for a multi-plane structure and an unevenness extraction program for the multi-plane structure, capable of extracting unevenness of a plurality of planes forming the multi-plane structure from single-timing point group data.SOLUTION: An unevenness extraction device divides a plurality of planes of a structure formed of the plurality of planes at the time of completion, for each predetermined distance in an interconnect line direction to set small segments, and repeats processing of extracting as a small plane a determination plane having the maximum number of points in a three-dimensional point group data in which normal line distances from determination planes set in the respective small segments are within a threshold value, and when the number of the small planes in the small segments is not more than the number of reference planes, sets virtual planes equal in number to the planes at the time of completion, and sets as common virtual planes
