Fisk, Thomas E.,Ferguson, John,Freedman, Jonathan R.
申请号：
AU2013202893
公开号：
AU2013202893A1
申请日:
2013.04.08
申请国别(地区):
AU
年份:
2013
代理人:
摘要：
#$%^&*AU2013202893A120130502.pdf#####ABSTRACT Outgassing method for inspecting a coated surface A method for inspecting the product of a coating process is provided. Therein, the release of at least one volatile species from the coated surface into the gas space adjacent to the coated surface is measured and the result is compared with the result for at least one reference object measured under the same test conditions. Thus the presence or absence of the coating, and/or a physical and/or chemical property of the coating can be determined. The method is useful for inspecting any coated articles, e.g. vessels. Its application on the inspection of PECVD coatings made from organosilicon precursors, especially of barrier coatings, is also disclosed.
