FISK, THOMAS E.,FERGUSON, JOHN,FREEDMAN, JONATHAN R.
申请号：
CA2761905
公开号：
CA2761905C
申请日:
2010.05.12
申请国别(地区):
CA
年份:
2017
代理人:
摘要：
A method for inspecting the product of a coating process is provided. Therein,the release of at least one volatilespecies from the coated surface into the gas space adjacent to the coatedsurface is measured and the result is compared with theresult for at least one reference object measured under the same testconditions. Thus the presence or absence of the coating,and/or a physical and/or chemical property of the coating can be determined.The method is useful for inspecting any coatedarticles, e.g. vessels. Its application on the inspection of PECVD coatingsmade from organosilicon precursors, especially of barriercoatings, is also disclosed.
