National Institutes for Quantum and Radiological Science and Technology
发明人:
申请号：
EP19154594.6
公开号：
EP3524320A1
申请日:
2019.01.30
申请国别(地区):
EP
年份:
2019
代理人:
摘要：
There are provided a small-sized ion source device, a particle beam generation device, and an ion beam generation method which generate a plurality of ion species while switching the ions species in a short time. An ion source device 1 which generates an ion beam from gas introduced into a vacuum, the ion source device including: a chamber 12 whose inside is a vacuum； a gas supply unit 26 which supplies gas to the inside of the chamber； and an ionization energy supply unit which supplies ionization energy for ionizing atoms of the gas to the inside of the chamber, wherein the gas supply unit 26 includes: a plurality of gas cylinders (17A, 17B, and 17C) each of which is filled with each of a plurality types of gases； pipes (24A, 24B, 24C, and 25) connected to the gas cylinders to feed the gases to the chamber； and pulse-control gas valves (21A, 21B, and 21C) which are attached to the pipes and are settable to an open state in a pulsed manner for a short period of time.
