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誘電体の屈折率の検出方法およびその装置、膜厚検出方法およびその装置ならびに表面粗さ検出方法およびその装置
专利权人:
一般財団法人電力中央研究所
发明人:
福地 哲生
申请号:
JP20140017376
公开号:
JP6281941(B2)
申请日:
2014.01.31
申请国别(地区):
日本
年份:
2018
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a dielectric refraction index detection method capable of highly accurately detecting a refraction index of a dielectric or the like in a case of detecting the refraction index of the dielectric or the like by reflection of an electromagnetic wave.SOLUTION: A terahertz wave is incident perpendicularly on a rough surface 13A of a dielectric 13 via a lens 8, and an intensity signal I representing intensity of the terahertz wave reflected by the rough surface 13A is detected. On the other hand, the terahertz wave is incident perpendicularly on a mirror surface 12A of a metallic plate 12 via the lens 8, and an intensity signal Irepresenting intensity of the terahertz wave reflected by the mirror surface 12A is detected. Furthermore, the intensity signals I and Iare each detected at a plurality of viewing angles &phgr; of the lens 8, respectively, a ratio (I/I) of the intensity signal I to the intensity signal Iat each viewing angle &phgr; is obtained and a characteristic curve rep
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