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DISPOSITIF DE TOMOGRAPHIE
专利权人:
KOWA Co.; Ltd.
发明人:
申请号:
EP15814335.4
公开号:
EP3165151A1
申请日:
2015.06.30
申请国别(地区):
EP
年份:
2017
代理人:
摘要:
The tomographic image capturing device of the present invention is configured to: split light from a light source (11) into measurement light and reference light; cause the measurement light and the reference light to be incident to an object (E) and a reference object (49), respectively; and capture tomographic images of the object (E) on the basis of interference light generated by superposition of the measurement light reflected from the object (E) and the reference light reflected from the reference object (49). The tomographic image capturing device has a first image capturing mode and a second image capturing mode. The first and second image capturing modes are each a mode in which the measurement light is two-dimensionally scanned to be incident to the object (E) and the tomographic images of the object (E) are captured. The two-dimensional scans in the second image capturing mode require a shorter time than that required for the two-dimensional scans in the first image capturing mode. The capturing of the tomographic images in the first image capturing mode is performed after performing adjustment of an image capturing condition necessary for capturing the tomographic images in the first image capturing mode. The adjustment is based on the tomographic images captured in the second image capturing mode.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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