PROBLEM TO BE SOLVED: To easily manufacture a fine radiation collimator having one or more deep hole openings in which an opening interval is about 0.2 to 0.3 mm and an opening diameter is ten times or more as long as a fine hole diameter of about 0.1 mm.SOLUTION: Openings and positioning holes are formed in a plate-like material by etching, press working or laser processing, one or more plate-like materials are laminated by allowing positioning pins previously installed on a fixture to pass through or are laminated while being positioned by putting an edge of a material plate onto a positioning holder.COPYRIGHT: (C)2013,JPO&INPIT【課題】開口部間隔が0.2mmから0.3mm程度で開口部径が0.1mm程度の微細な穴径の10倍以上の深穴開口部を1ないし複数持つ微細放射線コリメーターを容易に製造すること。【解決手段】板状の材料物質にエッチングまたはプレス加工若しくはレーザー加工により開口部及び位置決め穴を形成し、これを1枚ないし複数枚あらかじめ固定治具に設置された位置決めピンを貫通させて積層するか若しくは材料板のエッジを位置決め治具に当て位置決めしながら積層する。【選択図】図2