Jeffrey Spiegelman,Douglas Shepherd,Russell J. Holmes,Zohreh Shamsi
申请号：
US15751044
公开号：
US20180229149A1
申请日:
2016.08.10
申请国别(地区):
US
年份:
2018
代理人:
摘要：
Methods for the gas-phase delivery of gases, such as process gases, from the gas phase of a multicomponent source liquid are provided. The methods are generally directed to the generation of process gases having mass flow rates which are proportional to the input power delivered to the multicomponent source liquid containers. The methods may be used to deliver process gases to critical process applications.
