ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE;한국전자통신연구원
发明人:
KIM, YARK YEON,김약연,YU, HAN YOUNG,유한영,YUN, YONG JU,윤용주,JANG, WON ICK,장원익,JEONG, EUN JU,정은주,HAN, CHANG HO,한창호
申请号：
KR1020110136594
公开号：
KR1020130069064A
申请日:
2011.12.16
申请国别(地区):
KR
年份:
2013
代理人:
摘要：
PURPOSE: A plasma brush is provided to comprise a nozzle formed with a rectangular or elliptical outlet having a longer horizontal length than a vertical length, and to comprise a filler nozzle formed with pores which are inserted into the outlet of the nozzle and arranged in a rectangular or elliptical shape as same as the outlet. CONSTITUTION: A plasma brush comprises: a connector； a nozzle (20) connected to the connector； a power electrode (30) formed in one side of the nozzle； and a ground electrode (40) formed in the other side of the nozzle facing the connector. The nozzle has an outlet formed in a rectangular or elliptical shape whose horizontal length is longer than the vertical length. The power electrode and the ground electrode comprise a first metal ring and a second metal ring surrounding the outer periphery of the nozzle respectively. The nozzle comprises a dielectric. The connector comprises a pipe having channel holes which flows the gas.플라즈마 브러시가 제공된다. 이 브러시는 커넥터와, 상기 커넥터에 연결되는 노즐과, 상기 노즐의 일측에 형성된 파워 전극과, 상기 커넥터에 대향되는 상기 노즐의 타측에 형성된 접지 전극을 포함한다.
