PROBLEM TO BE SOLVED: To make a structure in which a tubular dielectric is hard to break. A plasma device includes an irradiation device having a plasma generating unit, a nozzle for discharging at least one of plasma generated in the plasma generating unit and active gas generated by the plasma, and a plasma generating gas in the plasma generating unit. With a supply source to supply. The plasma generating portion is arranged in the inner space of the tubular dielectric 3 and the tubular dielectric 3 having an inner space which is a flow path of the plasma generating gas supplied from the supply source, and is arranged in the axial direction of the tubular dielectric 3. An internal electrode 4 extending to the inside, an external electrode 5 arranged at a position facing the internal electrode 4 along the outer peripheral surface of the tubular dielectric 3, and a fixing member 33 for fixing the external electrode 5 to the tubular dielectric 3. , Have. [Selection diagram] FIG. 8【課題】管状誘電体が壊れにくい構造にする。【解決手段】プラズマ装置は、プラズマ発生部と、プラズマ発生部にて発生したプラズマ及びプラズマによって生じる活性ガスの少なくとも一方を吐出するノズルと、を有する照射器具と、プラズマ発生部にプラズマ発生用ガスを供給する供給源と、を備える。プラズマ発生部は、供給源から供給されたプラズマ発生用ガスの流路である内空部を有する管状誘電体３と、管状誘電体３の内空部に配置され、管状誘電体３の軸線方向に延びる内部電極４と、管状誘電体３の外周面に沿って内部電極４に対向する位置に配置される外部電極５と、管状誘電体３に対して外部電極５を固定させる固定部材３３と、を有する。【選択図】図８
