Il-Gyo Koo,Myeong Yeol Choi,Doreene Hyatt,Amber Zagrodzki,Dean A. Hendrickson,George J. Collins
申请号：
US14155636
公开号：
US09269544B2
申请日:
2014.01.15
申请国别(地区):
US
年份:
2016
代理人:
摘要：
A plasma system is disclosed. The system includes a plasma device including an inner electrode and an outer electrode coaxially disposed around the inner electrode, wherein at least one of the inner electrode and the outer electrode is temperature controlled an ionizable media source coupled to the plasma device and configured to supply ionizable media thereto and a power source coupled to the inner and outer electrodes and configured to ignite the ionizable media at the plasma device to form a plasma effluent.
