微粒子汚染測定方法及び装置

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专利权人:

エーエスエムエル ネザーランズ ビー．ブイ．;ティー・エヌ・オー

发明人:

デ ヨング，アンソニウス,ヴァン デル ドンク，ジェイクス

申请号：

JP20150502369

公开号：

JP6282260(B2)

申请日:

2013.03.28

申请国别(地区):

日本

年份:

2018

代理人:

摘要：

A particulate contamination measurement method and apparatus are discussed. The method, for example, comprises pressing a measurement surface (5) of a polyurethane elastomer (2) against a surface (7) to be measured, removing the polyurethane elastomer from the surface without leaving residues, then using an optical apparatus (11) to detect particles (8) which have been removed by the polyurethane elastomer from the surface and which have become attached to the polyurethane elastomer.

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中国工程科技知识中心

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