The present invention relates to an apparatus for sterilization which may be applied to a medical dry sterilizer, and more particularly, to an apparatus which injects hydrogen peroxide so as to generate plasma and OH radicals which are effective in sterilization, so as to achieve the sterilization of a treated object. According to the present invention, the apparatus for sterilization comprises: a sterilizing reactor in which sterilization is performed on a treated object a vacuuming unit which is equipped with a vacuum pump connected to the sterilizing reactor and which vacuumizes the interior of the sterilizing reactor a hydrogen-peroxide supply unit which supplies hydrogen peroxide in a gas state to the interior of the sterilizing reactor and a microwave-plasma generating unit which generates plasma using microwaves. The microwave-plasma generating unit is provided with an electromagnetic-wave generating source which generates microwaves a plasma-generating unit which interconnects the hydrogen-peroxide supply unit and the sterilizing reactor such that hydrogen peroxide is supplied to the sterilizing reactor, and which generates plasma using microwaves and a microwave guide which delivers the microwaves generated from the electromagnetic-wave generating source to the plasma-generating unit.【課題】本発明は過酸化水素を投入してプラズマを発生させ、滅菌に効果的なOHラジカルを生成して被処理物の滅菌を達成させるための装置に関する。【解決手段】本発明は滅菌処理が行われる滅菌反応器と、上記滅菌反応器と連結された真空ポンプを備え、上記滅菌反応器の内部を真空状態にする真空形成部と、過酸化水素を提供する過酸化水素供給部と、マイクロウェーブを利用してプラズマを発生させるマイクロウェーブプラズマ発生部とを含み、上記マイクロウェーブプラズマ発生部は、マイクロウェーブを発生させる電磁波発生源と、過酸化水素が上記の滅菌反応器に供給されるように上記過酸化水素供給部と上記滅菌反応器を連結して、マイクロウェーブによってプラズマが発生するプラズマ発生部と、上記電磁波発生源から発生したマイクロウェーブを上記プラズマ発生部に伝えるマイクロウェーブガイドとを備える医療用プラズマ滅菌装置を提供する。【選択図】図1
