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Method for accurate and low consumption mems micropump actuation and device for carrying out said method
专利权人:
发明人:
CHAPPEL ERIC
申请号:
IN741/DELNP/2014
公开号:
IN2014DN00741A
申请日:
2014.01.31
申请国别(地区):
IN
年份:
2015
代理人:
摘要:
The present invention describes the improvements due to alternated actuation cycles to reduce the delivery errors related to the pumping chamber elasticity the actuator relaxation or hysteresis. The method actuates a pumping device with an optimal driving voltage profile wherein the pumping device comprises a pumping chamber including a pumping membrane and a voltage controlled actuator connected to said membrane the movement of said membrane being defined by three positions namely a rest a bottom and a top position. The method includes the actuation of the membrane with a pumping pattern including at least two different cycles : Cycle A : rest bottom rest top rest Cycle B : rest top rest bottom rest. The invention also relates to a device to carry out the method.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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