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METHOD FOR ACCURATE AND LOW-CONSUMPTION MEMS MICROPUMP ACTUATION AND DEVICE FOR CARRYING OUT SAID METHOD
专利权人:
发明人:
申请号:
EP12769478.4
公开号:
EP2737211A2
申请日:
2012.07.27
申请国别(地区):
EP
年份:
2014
代理人:
摘要:
The present invention describes the improvements due to alternated actuation cycles to reduce the delivery errors related to the pumping chamber elasticity, the actuator relaxation or hysteresis. The method actuates a pumping device with an optimal driving voltage profile, wherein the pumping device comprises a pumping chamber including a pumping membrane and a voltage controlled actuator connected to said membrane the movement of said membrane being defined by three positions, namely a rest, a bottom and a top position. The method includes the actuation of the membrane with a shot pattern including at least two different cycles : Cycle A : rest-bottom-rest-top-rest Cycle B : rest-top-rest-bottom-rest. The invention also relates to a device to carry out the method.
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