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Method for accurate and low-consumption MEMS micropump actuation and device for carrying out said method
专利权人:
Eric Chappel
发明人:
Eric Chappel
申请号:
US14235090
公开号:
US10041483B2
申请日:
2012.07.27
申请国别(地区):
US
年份:
2018
代理人:
摘要:
The present invention describes the improvements due to alternated actuation cycles to reduce the delivery errors related to the pumping chamber elasticity, the actuator relaxation or hysteresis. The method actuates a pumping device with an optimal driving voltage profile, wherein the pumping device comprises a pumping chamber including a pumping membrane and a voltage controlled actuator connected to said membrane; the movement of said membrane being defined by three positions, namely a rest, a bottom and a top position. The method includes the actuation of the membrane with a pumping pattern including at least two different cycles: Cycle A: rest-bottom-rest-top-rest Cycle B: rest-top-rest-bottom-rest. The invention also relates to a device to carry out the method.
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