Using scanning a plurality of sets of electromagnets, high accuracy, to provide a particle beam irradiation apparatus capable of scanning the charged particle beam a high degree of freedom from low speed to high speed. The charged particle beam irradiation apparatus by scanning the target trajectory in the two directions of the X and Y directions perpendicular to the traveling direction of the charged particle beam, a charged particle beam to be incident, is irradiated to the irradiation target, the two directions and the charged particle beam a plurality of sets of scanning magnet to scan the target trajectory is given by the sequence desired trajectory data when the target irradiation position corresponding to the time is determined, based on data of the plurality of frequency division series desired trajectory data when , I was like to have to generate a command value of the scanning electromagnet of each of the scanning electromagnet of the plurality of sets.複数組の走査電磁石を用いて、精度が高く、低速から高速まで自由度が高い荷電粒子ビームの走査が可能な粒子線照射装置を提供する。入射される荷電粒子ビームを、荷電粒子ビームの進行方向に垂直なX方向およびY方向の2方向の目標軌道に走査して、照射対象に照射する粒子線照射装置において、荷電粒子ビームを2方向に走査する走査電磁石の組を複数組備え、目標軌道は時間に対応した目標照射位置が決められた時系列目標軌道データで与えられ、時系列目標軌道データを周波数分割した複数のデータを基に、複数組の走査電磁石のそれぞれの走査電磁石の指令値を生成するようにしたようにした。
