To provide a charged particle beam treatment apparatus capable of improving accuracy of a charged particle beam irradiation position in an irradiated body.SOLUTION: An irradiation part 2 of a charged particle beam treatment apparatus includes: an X direction scanning electromagnet 61a for scanning a charged particle beam B in an X-axis direction orthogonal to a base axis AX of the charged particle beam B; a Y direction scanning electromagnet 61b for scanning the charged particle beam B in a Y-axis direction orthogonal to the base axis AX and the X-axis direction; an X direction scanning electromagnet 62a for scanning the charged particle beam B in the X-axis direction; a Y direction scanning electromagnet 62b for scanning the charged particle beam B in the Y-axis direction; a first position monitor 63 for detecting a passing position of the charged particle beam B on a plane along the X-axis direction and the Y-axis direction; and a second position monitor 64 disposed on the downstream side of the X direction scanning electromagnet 62a, the Y direction scanning electromagnet 62b, and the first position monitor 63 for detecting a passing position of the charged particle beam B on a plane along the X-axis direction and the Y-axis direction.SELECTED DRAWING: Figure 4【課題】被照射体における荷電粒子線の照射位置の精度向上を図ることが可能な荷電粒子線治療装置を提供する。【解決手段】荷電粒子線治療装置1の照射部2は、荷電粒子線Bの基軸AXに直交するX軸方向において荷電粒子線Bを走査するX方向走査電磁石61aと、基軸AX及びX軸方向に直交するY軸方向において荷電粒子線Bを走査するY方向走査電磁石61bと、X軸方向において荷電粒子線Bを走査するX方向走査電磁石62aと、Y軸方向において荷電粒子線Bを走査するY方向走査電磁石62bと、X軸方向及びY軸方向に沿った平面における荷電粒子線Bの通過位置を検出する第1位置モニタ63と、X方向走査電磁石62a、Y方向走査電磁石62b、及び第1位置モニタ63より下流側に配置され、X軸方向及びY軸方向に沿った平面における荷電粒子線Bの通過位置を検出する第2位置モニタ64と、を有する。【選択図】図4