METHOD FOR MANUFACTURING CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND APPARATUS CONFIGURED TO OBTAIN SUBJECT INFORMATION USING THE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER

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专利权人:

发明人:

Koichiro Nakanishi

申请号：

US15145678

公开号：

US20160243588A1

申请日:

2016.05.03

申请国别(地区):

US

年份:

2016

代理人:

摘要：

There is provided a method for manufacturing a capacitive micromachined ultrasonic transducer. In this method, a first insulating layer and a vibrating membrane are bonded by heat treatment and a second insulating layer is formed by thermal oxidation in a single heating step, with a cavity provided in the transducer communicating with the outside of the transducer through a communication portion.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/