A sterilization substance supply device is provided to shorten the time consumed for sterilization process and to enhance the operation efficiency at an isolator, wherein sterilization substance supply device (200) comprises sterilization gas generator (202) that is comprised of atomization member (210) and vaporization member (220). Within atomization member (210), hydrogen peroxide inside cup (214) is atomized by way of ultrasonic vibration generated by ultrasonic vibrator (213). The atomized hydrogen peroxide is then heated and vaporized by heater (222) within vaporization member (220), and the vaporized hydrogen peroxide is supplied to operating room (10) of isolator (100) as sterilization gas.本發明之目的在於縮短滅菌處理所需之時間,並且使以隔離體進行之作業效率提升。本發明之滅菌物質供給裝置(200)係具有由霧化部(210)及氣化部(220)所構成之滅菌氣體生成部(202)。在霧化部(210)中,藉由從超音波振動子(213)所產生之超音波振動,使杯部(214)內之過氧化氫霧化。經霧化之過氧化氫係在氣化部(220)中,以加熱器(222)加熱而氣化。經氣化之過氧化氫係作為滅菌氣體供給至隔離體(100)之作業室(10)。202...滅菌氣體生成裝置210...霧化部211...收容部212、228、270、2151、2152...凸緣213...超音波振動子214...杯部(貯留部)215...筒狀構件(連接構件)217...上面板218、2121、2144、2181、2282...O環220...氣化部221...加熱管222...加熱器223...散熱片224、275...配管226...流路227...溫度測量部232、239、2132、2143、2146、2281...螺絲233...隔熱材240...超音波傳輸物質(超音波傳輸用液)241...溫度計242...接頭252...開口(載體氣體供給口)254、2117...開口262...排水管273...蓋構件2111...第1空間2112...第2空間2115...分隔板2116、2122、2283、2701、2731、2781...槽2131...收容體2141...振動板2142...平板2147...上部開口2148...下部開口2175...栓2221...電力供給線2222...溫度測量用配線2285...接頭
