A sterile-substance-supplying apparatus comprising: an atomization unit 210 including a reservoir unit 214 to reserve hydrogen peroxide, and an ultrasound vibrator 213 to impart ultrasound vibration to the reserved hydrogen peroxide to be atomized an evaporation unit 220, provided above the reservoir unit 214, that heats the atomized hydrogen peroxide to be evaporated a connecting member 215 connecting the evaporation unit 220 and the atomization unit 210 to each other a hydrogen-peroxide-supply port 262 to allow the hydrogen peroxide to be supplied to the reservoir unit 214 a carrier-gas-supply port, provided at the connecting member 215, that allows carrier gas for allowing the atomized hydrogen peroxide to flow to the evaporation unit 220 to be supplied and a container portion 211 to reserve a substance for transmitting the ultrasound vibration 213 generated by the ultrasound vibrator, and a metal vibrating plate 2141, provided at a bottom portion of the reservoir unit 214, that transmits to the hydrogen peroxide the ultrasound vibration transmitted through the substance.
