To minimize the residual solution in generating the present invention relates hydrogen peroxide gas. [MEANS FOR SOLVING PROBLEMS] An atomizing unit for atomizing by applying ultrasonic vibration to the hydrogen peroxide is stored in the storage section, provided above the atomization unit, the hydrogen peroxide gas generator of the present invention, in the atomization unit a heater for heating in order to gasify the hydrogen peroxide is atomized, the heater is disposed in the interior space, the inner tube of metal leads upward hydrogen peroxide flowing together with a carrier gas is atomized by the atomization unit Soto is formed between the inner cylinder portion, the gas flow path of the carrier gas which constitute a double tube and parts, the inner cylinder portion is disposed in the interior space, descends toward the reservoir and characterized in that it is constructed with a cylindrical portion, so as to introduce into the reservoir of the carrier gas is allowed to contact the carrier gas flowing through the gas passage in the inner cylindrical portion is heated by the heater, the heated to. [Selection Figure Figure 2【課題】過酸化水素ガスを生成する際の残留溶液を極力少なくする。【解決手段】本発明の過酸化水素ガス生成装置は、貯留部に貯留された過酸化水素に超音波振動を与えて霧化させる霧化部と、前記霧化部の上方に設けられ、前記霧化部で霧化された過酸化水素をガス化すべく加熱するヒータと、前記ヒータが内側空間に配置され、前記霧化部で霧化されてキャリアガスとともに流れる過酸化水素を上方へ導く金属製の内筒部と、前記内筒部が内側空間に配置されて二重管を構成し、前記貯留部へ向かって下降する前記キャリアガス用のガス流路を、前記内筒部との間に形成する外筒部とを備え、前記ヒータで加熱された前記内筒部に前記ガス流路を流れるキャリアガスを接触させ、加熱された前記キャリアガスを前記貯留部へ導入するように構成したことを特徴とする。【選択図】図2
