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IMAGING APPARATUS AND IMAGING METHOD
专利权人:
发明人:
Marek Sternal,Kenji Muto,Krzysztof Wisniewski
申请号:
US13972842
公开号:
US20140063450A1
申请日:
2013.08.21
申请国别(地区):
US
年份:
2014
代理人:
摘要:
Provided is an imaging apparatus for acquiring a tomographic image of an object to be inspected based on light obtained by combining return light from the object illuminated with measuring light and reference light corresponding to the measuring light, the imaging apparatus including: a reference-light amount changing unit provided in an optical path of the reference light, for changing a reference-light amount of the reference light and a control unit for controlling the reference-light amount changing means so as to control the reference-light amount within a predetermined range and an image quality of the tomographic image within a predetermined image-quality evaluation range.
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中国工程科技知识中心
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