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オニオンライクカーボンの作製方法
专利权人:
大前;伸夫
发明人:
大前 伸夫,松本 直浩
申请号:
JP2009047435
公开号:
JP5375197B2
申请日:
2009.02.28
申请国别(地区):
JP
年份:
2013
代理人:
摘要:

PROBLEM TO BE SOLVED: To provide a production method of onion-like carbon excellent in forming thin films or dispersion and to sufficiently utilize lubricating characteristics of onion-like carbon.

SOLUTION: Onion-like carbon is synthesized by irradiating a target with carbon by using an arc plasma gum as an arc plasma generating means in a reaction chamber held at a vacuum degree equal to or in a higher vacuum degree than 10-7Pa. A carbon rod is mounted as a cathode of the arc plasma gun to irradiate the target with high purity carbon ions. The synthesis of the onion-like carbon is carried out by using, as parameters for production conditions, the discharge voltage, the number of discharge pulses and the vacuum degree.

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