PROBLEM TO BE SOLVED: To provide an electromechanical transducer capable of operating steadily in collapse mode at a lower voltage, without causing the electromechanical transduction efficiency to be reduced and without causing the signal detection function to be reduced and to provide a manufacturing method of the transducer.SOLUTION: The electromechanical transducer is provided with a vibrating membrane having a first electrode 1 a substrate having a second electrode and a support portion for supporting the vibrating membrane, with these electrodes disposed opposite so that a space is formed between the vibrating membrane and the substrate, wherein the electromechanical transducer has a contact region where a part of the region of the vibrating membrane is in contact with the region of the substrate and the region of the vibration membrane, other than the area held in a contact state, can vibrate. In the contact region, a region where the first and second electrodes overlap with each other exists, at least one of the electrodes has a through-part, in at least a part of the overlapped region.COPYRIGHT: (C)2009,JPO&INPIT【課題】コラプスモードで作動させるに際し、電気機械変換効率を低減させることなく、また信号検出機能を低下させることなく、安定性良く低電圧化を図ることが可能となる電気機械変換素子及びその製造方法を提供する。【解決手段】第1の電極が設けられている振動膜と、第2の電極が設けられている基板と、これら電極が対向配設されたもとで、前記振動膜と前記基板との間に空隙が形成されるように前記振動膜を支持する支持部と、を備えた電気機械変換素子であって、前記振動膜の一部領域と、前記基板の領域とが互いに接触する接触領域を有し、前記接触領域以外の振動膜の領域が振動可能であり、前記接触領域において、前記第1の電極と前記第2の電極とが重なる領域があり、前記重なる領域の少なくとも一部においてこれら電極の少なくともいずれか一方に貫通部が設けられている構成を有する。【選択図】 図1
