Robert Abrams;Tom Fisk;Jonathan Freedman;John Ferguson;John Felts;Robert Pangborn;Peter Sagona
发明人:
John Felts,Tom Fisk,Robert Abrams,John Ferguson,Jonathan Freedman,Robert Pangborn,Peter Sagona
申请号：
US13697048
公开号：
US20130209766A1
申请日:
2011.05.11
申请国别(地区):
US
年份:
2013
代理人:
摘要：
A method for coating a substrate surface by PECVD is provided, the method comprising generating a plasma from a gaseous reactant comprising an organosilicon precursor and optionally O2. The lubricity, hydrophobicity and/or barrier properties of the coating are set by setting the ratio of the O2 to the organo silicon precursor in the gaseous reactant, and/or by setting the electric power used for generating the plasma. In particular, a lubricity coating made by said method is provided. Vessels coated by said method and the use of such vessels protecting a compound or composition contained or received in said coated vessel against mechanical and/or chemical effects of the surface of the uncoated vessel material are also provided.
