Fisk, Thomas E.,Ferguson, John,Freedman, Jonathan R.
申请号：
AU2010249031
公开号：
AU2010249031B2
申请日:
2010.05.12
申请国别(地区):
AU
年份:
2015
代理人:
摘要：
A method for inspecting the product of a coating process is provided. Therein, the release of at least one volatile species from the coated surface into the gas space adjacent to the coated surface is measured and the result is compared with the result for at least one reference object measured under the same test conditions. Thus the presence or absence of the coating, and/or a physical and/or chemical property of the coating can be determined. The method is useful for inspecting any coated articles, e.g. vessels. Its application on the inspection of PECVD coatings made from organosilicon precursors, especially of barrier coatings, is also disclosed.
