複数の投影対物レンズを備えた投影露光装置

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专利权人:

カール・ツァイス・エスエムティー・ゲーエムベーハー

发明人:

ドドック，アウレリアン,ユーリッヒ，ヴィルヘルム,フェルトマン，ヘイコ

申请号：

JP20120094123

公开号：

JP6063637(B2)

申请日:

2012.04.17

申请国别(地区):

日本

年份:

2017

代理人:

摘要：

The invention relates to a projection light facility (1) comprising a plurality of projection objective lenses (10) for reproducing each object field (50) on the image field (60). The image fields (60) are located in a substrate area (40) on the substrate plane, wherein said substrate area (40) is displaceable in a predefined scanning direction (5) with respect to the plurality of projection objective lenses, at least one projection objective lens is provided with a partial section of the optical axis thereof which is not perpendicular to the substrate plane and the projection of said partial section on the substrate plane is not parallel to the scanning direction (5).

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/