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MEASUREMENT PROCESSING DEVICE, MEASUREMENT PROCESSING METHOD, MEASUREMENT PROCESSING PROGRAM, AND STRUCTURE PRODUCTION METHOD
专利权人:
Nikon Corporation
发明人:
MACHII, Nobukatsu,HAYANO, Fuminori,KAWAI, Akitoshi
申请号:
EP20140901232
公开号:
EP3190403(A1)
申请日:
2014.09.02
申请国别(地区):
欧洲专利局
年份:
2017
代理人:
摘要:
A measurement processing device used for an x-ray inspection apparatus that detects an x-ray passing through a specimen with a detection unit to sequentially inspect a plurality of specimens on the basis of an acquired transmission image, includes a setting unit for setting a region to be inspected on a portion of the specimen; a determination unit for determining the non-defectiveness of the region to be inspected by using a transmission image of the x-ray that passed through the region to be inspected; a correction unit for performing a correction on the region to be inspected on the basis of a determination result by the determination unit; and a display control unit for displaying the corrected region to be inspected corrected by the correction unit.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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