PROBLEM TO BE SOLVED: To enhance insulation properties between a needle electrode and a counter electrode, achieve high-density, high-output corona discharge while retaining safety, and generate an active species in a wider range, and thereby, to achieve both increase in an active species generation amount and reduction in size.SOLUTION: An active species generation unit 8 comprises: a frame body 22 in which a plurality of support pillars are provided to a plate member whose center is opened a discharge electrode 17 configured by bonding a needle 25 with a sheet metal having a power supply connector 26 an insulating substrate 16 configured by ceramics, and on whose surface a semi-conductive material is applied, and having a hole part 21 at the center a counter electrode 23 that is a sheet metal whose center part is opened and having a power supply connector 19 and a plate fixing part 24 for overlapping the counter electrode 23 and the insulating substrate 16 with each other and sandwiching them with the frame body 22. A voltage is applied to the discharge electrode 17 and the counter electrode 23 by a power supply part 20 to generate an active species by corona discharge. An insulation resin is used for the frame body 22.COPYRIGHT: (C)2013,JPO&INPIT【課題】本発明は、針電極と対向電極の間の絶縁性を高め、安全性を保持しながら高密度で高出力のコロナ放電を実現し、より広い範囲で活性種を生成させることにより、活性種発生量の増加と小型化を両立させることを目的とするものである。【解決手段】中央が開口した板部材に複数の支柱を設けた枠体22と、針25と電源接続部26を備えた板金を接合して構成された放電電極17と、セラミックで構成され表面に半導電材料を塗布した中央に孔部21を備えた絶縁性基板16と、中央が開口しかつ電源接続部19を備えた板金である対向電極23と、対向電極23と絶縁性基板16を重ねて枠体22と挟み込む板固定部24を備え、放電電極17と対向電極23に電源部20より電圧を印加してコロナ放電により活性種を発生する活性種発生ユニット8において、枠体22に絶縁性の樹脂を用いる構造とした。【選択図】図3
