PROBLEM TO BE SOLVED: To achieve both increase in an amount of a generated active species and reduction in size.SOLUTION: An active species generation unit 8 comprises: a frame body 22 obtained by providing a plurality of support pillars 31 to a plate member 32 whose central part is opened a discharge electrode 17 configured by bonding a plate gold having a needle electrode 25 and a power supply connector 26 an insulation substrate 16 formed of ceramics, and to whose surface a semi-conductive material is applied, and that has a hole part 21 at the center a counter electrode 23 that is a plate gold whose central part is opened and which has a power supply connector 19 and a plate fixing part 24 for laminating the counter electrode 23 and the insulation substrate 16, and sandwiching them with the frame body 22. A voltage is applied from a power supply part 20 to the discharge electrode 17 and the counter electrode 23 to generate an active species by corona discharge. A ring-like convex part 28 is provided around the central opening of a surface opposed to the discharge electrode 17 of the plate member 32 of the frame body 22. A reinforcement member 29 unified with the plate member 32 is provided between adjacent support pillars 31 of the frame body 22.COPYRIGHT: (C)2013,JPO&INPIT【課題】活性種発生量の増加と小型化を両立させることを目的とするものである。【解決手段】中央が開口した板部材32に複数の支柱31を設けた枠体22と、針状電極25と電源接続部26を備えた板金を接合して構成された放電電極17と、セラミックで構成され表面に半導電材料を塗布した中央に孔部21を備えた絶縁性基板16と、中央が開口しかつ電源接続部19を備えた板金である対向電極23と、対向電極23と絶縁性基板16を重ね、枠体22とで挟み込む板固定部24を備え、放電電極17と対向電極23に電源部20より電圧を印加してコロナ放電により活性種を発生する活性種発生ユニット8であって、枠体22の板部材32の放電電極17に対向する面の中央開口周辺にリング状の凸部28を設け、かつ枠体22の隣り合う支柱31間に板部材32と一体となった補強部材29を設けた。【選択図】図3
