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Structures for split gate memory cell scaling with merged control gates
专利权人:
NXP USA, INC.
发明人:
Roy Anirban,Chang Ko-Min
申请号:
US201615014267
公开号:
US9620604(B2)
申请日:
2016.02.03
申请国别(地区):
美国
年份:
2017
代理人:
摘要:
A memory device has first and second memory cells in and over a substrate. A first doped region is in a first active region. A top surface of the first active region is substantially coplanar with a top surface of the first doped region. A control gate is over the first doped region and extends over a first side of the first doped region and over a second side of the first doped region. A charge storage layer is between the first control gate and the first active region including between the first select gate and the first doped region. A first select gate is over the first active region on the first side of the first doped region and adjacent to the control gate. A second select gate is over the first active region on the second side of the first doped region and adjacent to the control gate.
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