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LASER PROCESSING APPARATUS AND PROCESSING METHOD EMPLOYED THEREIN
专利权人:
SUMITOMO ELECTRIC INDUSTRIES; LTD.
发明人:
YAMADA EIICHIRO,INOUE AKIRA,NAKAZATO KOJI,KOHDA HIROSHI,HATAYAMA HITOSHI,HASEGAWA TAKEMI
申请号:
EP09797780
公开号:
EP2329907A4
申请日:
2009.06.18
申请国别(地区):
EP
年份:
2014
代理人:
摘要:
A laser processing apparatus 1 includes a processing light source 3 emitting processing light an observation light emitting unit 4 emitting observation light optical fibers 19 conducting light having a plurality of wavelengths generated at an electronic component 2 a detecting unit 5 detecting the light conducted by the optical fibers 19 and a control unit 31 controlling a light emitting state of the processing light emitting unit 3. The optical fibers 19 are categorized into four groups, and disposed so as to surround an optical fiber 18 conducting the processing light. The optical fibers 19 categorized into the four groups are capable of conducting the observation light to the electronic component 2 every group.
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中国工程科技知识中心
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