金属または合金蒸発用容器およびその使用方法

• 收藏
• 分享

专利权人:

日本タングステン株式会社

发明人:

松尾 繁

申请号：

JP20130059398

公开号：

JP6118151(B2)

申请日:

2013.03.22

申请国别(地区):

日本

年份:

2017

代理人:

摘要：

PROBLEM TO BE SOLVED: To obtain an evaporation container which holds a molten metal or alloy and is suitable for forming a film by evaporating a metal.SOLUTION: An evaporation container is formed of ceramic containing a tungsten carbide (such as WC and WC) as a main component. The tungsten carbide enables highly efficient evaporation of a metal without being reacted with evaporated gas and without being melted and deformed at an evaporation temperature. The tungsten carbide has a relatively high thermal conductivity of 60-70 (W/m K) to facilitate temperature control.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/