BARANOV ALEKSANDR MIKHAJLOVICH;KONDRASHOV PAVEL EVGEN'EVICH;SMIRNOV IGOR' SERGEEVICH
发明人:
BARANOV A.M.,KONDRASHOV P.E.,SMIRNOV I.S.
申请号：
RU19970106825
公开号：
RU2199110(C2)
申请日:
1997.04.24
申请国别(地区):
俄罗斯
年份:
2003
代理人:
摘要：
FIELD: nondestructive inspection of objects. SUBSTANCE: device incorporates X- ray source and registration system connected to technological system. Registration system shows capability for registration of reflected radiation simultaneously and independently at various angles within solid angle 0-pi/2. Procedure is realized by irradiation of sample with X-ray flux with wave length lambda, at angle theta and by simultaneous registration of reflected X-ray flux. Change of thickness of film coat is observed of oscillation of specular ray. Measuring angular distribution of radiation diffusely scattered by roughness it is possible to determine root-mean-square value sigma of film surface. Density of material can be computed by change of contrast of oscillation of specular ray if change of sigma is known. EFFECT: potential for generation of more objective information on topography of surface of film coat and on density of growing layer right in the run of technological process. 10 cl, 3 dwg
