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薄膜トランジスタおよび表示装置
专利权人:
株式会社神戸製鋼所
发明人:
三木 綾,森田 晋也,後藤 裕史,田尾 博昭,釘宮 敏洋
申请号:
JP20130168290
公开号:
JP6134230(B2)
申请日:
2013.08.13
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
Provided is a thin film transistor comprising an oxide semiconductor thin film layer and has a threshold voltage that does not change much due to light, a bias stress or the like, thereby exhibiting excellent stress stability. A thin film transistor of the present invention is provided with: a gate electrode; two or more oxide semiconductor layers that are used as a channel layer; an etch stopper layer for protecting the surfaces of the oxide semiconductor layers; a source-drain electrode; and a gate insulator film interposed between the gate electrode and the channel layer. The metal elements constituting an oxide semiconductor layer that is in direct contact with the gate insulator film are In, Zn and Sn. The hydrogen concentration in the gate insulator film, which is in direct contact with the oxide semiconductor layer, is controlled to 4 atomic % or less.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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