ALKOXIDE COMPOUND, THIN FILM-FORMING STARTING MATERIAL, THIN FILM FORMATION METHOD, AND ALCOHOL COMPOUND
- 专利权人:
- ADEKA CORPORATION
- 发明人:
- SAKURAI Atsushi,HATASE Masako,YOSHINO Tomoharu,ENZU Masaki
- 申请号：
- US201515318755
- 公开号：
- US2017129912(A1)
- 申请日:
- 2015.07.16
- 申请国别(地区):
- 美国
- 年份:
- 2017
- 代理人:
- 摘要：
- The alkoxide compound of the present invention is characteristically represented by the following general formula (I):;
- 来源网站：
- 中国工程科技知识中心
