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光学特性計測装置および光学特性計測方法
专利权人:
株式会社トプコン;国立大学法人電気通信大学
发明人:
関根 明彦,渡邉 恵理子
申请号:
JP20120272290
公开号:
JP6057210(B2)
申请日:
2012.12.13
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
An apparatus enabling abnormality detection of a sample. A first interference optical system scans the sample with first signal light from a first sample optical path, making the first signal light interfere with first reference light from a first reference optical path, to detect first interference light. Optical path length difference between the first sample optical path and first reference optical path is changed based on the detection. A change in the optical path length difference is determined. A second interference optical system scans the sample with second signal light from a second sample optical path, making the second signal light interfere with second reference light from a second reference optical path to detect second interference light. Tomographic information of the sample based on detection of the second interference light is determined. A refractive index profile of the sample is obtained based on the change amount information and tomographic information.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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