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Method and apparatus for processing a minute portion of a specimen
专利权人:
HITACHI, LTD.
发明人:
YAMAGUCHI, HIROSHI,NOGUCHI, MINORI,KOHNO, MAKIKO,NAKATA, TOSHIHIKO
申请号:
US19930012758
公开号:
US5333495(A)
申请日:
1993.03.11
申请国别(地区):
美国
年份:
1994
代理人:
摘要:
A method for detecting a photoacoustic signal includes the steps of modulating the intensity of light obtained from a light source at a predetermined modulation frequency, exciting a specimen by directing the intensity-modulated light onto the specimen, thereby generating a photoacoustic effect in the specimen, detecting the photoacoustic effect generated in the specimen and producing a detection signal indicative of the detected photoacoustic effect, and extracting information about the surface and interior of the specimen from the detection signal, wherein the intensity-modulated light is emitted from an aperture of a near-field optical scanning microscope used in directing the intensity-modulated light onto the specimen while a distance between the aperture of the near-field optical scanning microscope and the surface of the specimen is maintained constant irrespective of the photoacoustic effect generated in the specimen.
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