<；P>；PROBLEM TO BE SOLVED: To provide a manufacturing method of an accurately integrally moldable needle-like body having the optional length, in a fine array-shaped needle-like body used, for example, for a MEMS device, medical treatment and innovative drug development. <；P>；SOLUTION: A first mask is applied so that a place for forming a plurality of needle-like bodies on a silicon wafer is formed as an opening part, and an upper inclined face being the tip of the needle-like bodies is formed by applying crystal anisotropic etching. Next, the first mask is separated, and a second mask is applied to the place for forming the needle-like bodies of the upper inclined face. Dry etching for forming a body of the needle-like bodies is applied, by repeating an etching step and a passivation step from surface in the same direction as a surface of applying the crystal anisotropic etching. <；P>；COPYRIGHT: (C)2008,JPO&INPIT
