針状体の製造方法
- 专利权人:
- 凸版印刷株式会社
- 发明人:
- 木下 拡充,窪田 健太郎
- 申请号：
- JP2006209533
- 公开号：
- JP4930899B2
- 申请日:
- 2006.08.01
- 申请国别(地区):
- JP
- 年份:
- 2012
- 代理人:
- 摘要：
To provide a method of manufacturing a microneedle-like body, capable of flexibly selecting the angle of the tip, and capable of reducing the puncture resistance, for example and by reducing the angle of the tip.
SOLUTION: The method is for manufacturing the microneedle-like body 1 which can be integrally molded in the shape of an array. The method of manufacturing the needle-like body 1 is characterized by (1) a process for masking the surface of a silicon wafer whose direction of the crystal face is neither 100 and 110 nor 111 with an opening at a position where a plurality of needle-like bodies should be formed and dry-etching the surface by repeating the etching step and the passivation step to form a body part of the needle-like body and (2) a process for forming an upper inclined surface and the silicon surface 111, as the tip of the needle-like body by releasing the mask and applying the crystal anisotropic etching.
COPYRIGHT: (C)2008 and JPO& INPIT
- 来源网站：
- 中国工程科技知识中心
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